Ultra-compact He+ irradiation facility for thin magnetic films

Spin-Ion Technology offers ultra-compact He+ ion beam process technology to enhance the magnetic properties of thin films at the atomic scale.

Spin-Ion’s technology has been developed in partnership with renowned companies expert in ion beam technology to deliver dedicated tools to customers working in nanomagnetism and spintronics.

Key Features

  • He+ ions with energies ranging from 1.0 to 30 KeV
  • Electron Cyclotron Resonance (ECR) Ion Source
  • Ultra-compact/small foot-print
  • Standalone (ex-situ) system or integrated (in-situ) with UHV process equipment (sputtering, tube, etc.)
  • Beam currents from a few microamperes up to several milliamperes
  • 1 inch coupon sample capability
  • Hardware and software for remote control


  • Heating sample holder for annealing samples under irradiation
  • Load lock system
  • Measurement evaluation
  • Form factors larger than one (1) inch
  • Various ions types on demand